Silicon Based Thin Film Solar Cells


by

Roberto Murri

DOI: 10.2174/97816080551801130101
eISBN: 978-1-60805-518-0, 2013
ISBN: 978-1-60805-456-5





Silicon Based Thin Film Solar Cells explains concepts related to technologies for silicon (Si) based photovoltaic applications. Topics...[view complete introduction]
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Sputtering of Thin Films

- Pp. 58-80 (23)

Paolo Rava

Abstract

Sputtering is one of the most widely used techniques for deposition of thin films. This chapter reviews the physical foundations of sputtering in a plasma and its application to the deposition of thin films. Different sputtering techniques are described and their advantages and disadvantages are highlighted.

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