Semiconductor Strain Metrology: Principles and Applications


by

Terence K.S. Wong

DOI: 10.2174/97816080535991120101
eISBN: 978-1-60805-359-9, 2012
ISBN: 978-1-60805-554-8



Indexed in: Scopus, EBSCO.

This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emer...[view complete introduction]
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