Silicon Based Thin Film Solar Cells


by

Roberto Murri

DOI: 10.2174/97816080551801130101
eISBN: 978-1-60805-518-0, 2013
ISBN: 978-1-60805-456-5





Silicon Based Thin Film Solar Cells explains concepts related to technologies for silicon (Si) based photovoltaic applications. Topics...[view complete introduction]
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Deposition of Thin Films: PECVD Process

- Pp. 29-57 (29)

Armando Menéndez, Pascal Sánchez and David Gómez

Abstract

Plasma enhanced chemical vapor deposition technique plays a key role in the development of solar cells based on amorphous and microcrystalline silicon thin films. The deposition process depends strongly on physical and chemical interactions in the plasma. Subsequently, the film properties are dependent on different parameters such as power and frequency, the substrate temperature, the gas pressure and composition, the magnitude and the pattern of the gas flow, the electrode geometry, etc. The aim of this chapter is to discuss all effects of these parameters in detail.

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