Ion Implantation and Activation

Volume 1

by

Kunihiro Suzuki

DOI: 10.2174/97816080578181130101
eISBN: 978-1-60805-781-8, 2013
ISBN: 978-1-60805-782-5
ISSN: 2589-2940 (Print)
ISSN: 2215-0005 (Online)



Indexed in: EBSCO.

Ion Implantation and Activation – Volume 1 presents the derivation process of ...[view complete introduction]
US $
Buy Personal eBook
79
Order Library eBook
316
Order Printed Copy
*153
Order PDF + Printed Copy (Special Offer)
*192

*(Excluding Mailing and Handling)

🔒Secure Checkout Personal information is secured with SSL technology

LSS Theory

- Pp. 302-375 (74)

Kunihiro Suzuki

Abstract

Ion implantation profiles are expressed by the Pearson function with first, second, third and fourth moment parameters of Rp , ΔRp , γ , and β. We can derive an analytical model for these profile moments by solving a Lindhard-Scharf-Schiott (LSS) integration equation using perturbation approximation. This analytical model reproduces Monte Carlo data which were well calibrated to reproduce a vast experimental database. The extended LSS theory is vital for instantaneously predicting ion implantation profiles with any combination of incident ions and substrate atoms including their energy dependence.

Purchase Chapter  Book Details

Advertisement


Webmaster Contact: info@benthamscience.net Copyright © 2019 Bentham Science